SEM+FIB Tescan Solaris


Dual-beam scanning electron microscope Tescan Solaris
Tescan Solaris dual-beam scanning electron microscope is equipped with two columns Triglav electron column combining a unique combination of immersion optics and crossover-free mode for ultra-high resolution imaging across the entire electron beam energy range and the Orage ion column with Ga source of ions has been designed to meet the most stringent requirements. to sample preparation using a focused ion beam. A distinctive feature of Tescan Solaris microscope is the crossover-free mode – this is a mode in which the electron beam is not broadened, which makes it possible to obtain images with high-resolution. Tescan Solaris microscope allows you to solve a wide range of research tasks, for example, to study the morphology of particles or surfaces, to study the elemental composition of samples, etc., since it is equipped with ETD, TLD, DBS, EDX, EBSD, STEM 3+ detectors, with the ability to work in BF , DF and HAADF modes. It should be noted that the Tescan Solaris microscope is equipped with an analytical system TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry), which allows the determination of light elements, including lithium, hydrogen, carbon or boron, in contrast to energy dispersive X-ray spectroscopy.

Production year, manufacturer, country of manufacture: 2020, Tescan, Czech Republic

Electron beam resolution(E-beam):
0.6 nm at 30 kV (STEM);
0.6 nm at 15 kV; 1.2 nm at 2 kV;
Ion beam resolution(I-beam):
2.5 nm at 30 kV;
Landing voltage range:
E-beam: 20 V – 30 kV;
I-beam: 500 V – 30 kV;
Probe current:
E-beam: 2.0 pA – 400 nA;
I-beam: 0.1 pА – 100 nА.